3 KudoZ points awarded for this answer. Comment: "This was also confirmed independently by a friend of mine who is a nanotechnology consultant. He also pointed out the following: "Microsystems technology is about making little things, and some of the techniques used, especially printing and photo- and X-ray lithography, are also used in silicon microelectronics: if you add the metal interconnects you can include things like galvanic deposition as well. But there are also technologies that are not so related, e.g. injection molding or micromachining. If "der siliciumnahen Mikrosystemtechnik" means the silicon related aspects of Microsystems technology, then the German sentence is correct, but would need to be kind of rewritten, e.g. "in integration with microsystems technology, which is to a large extent compatible with silicon technology". Or "silicon related aspects of microsystems technology". But it all sounds kind of awkward, and you might prefer just to stick with "silicon related".". Wow!"