English to Russian Tech/Engineering Engineering (general) Нанесение покрытий

Application of the Faraday cage to filled plasma crucible will now be described. It should be noted that in practice a plurality of crucibles would be processed together in a batch. For simplicity of explanation, a single crucible only is referred to below:
1. The crucible is cleaned with standard glass cleaning practices to prepare it for metal deposition.
2. The crucible is heated up in a clean furnace to 450°C to eliminate any surface water vapour.
3. The crucible is immediately loaded into a Sputtering Vacuum Chamber,
preferably while still hot. For coating of the rear face of the crucible, it is fixedly mounted with the rear face directed towards an aluminium sputtering target. For coating the front face and the circular cylindrical sidewall, it is mounted obliquely on holder 20 such as shown in Figure 4. This has a stationary member 21, having 45° angled bores 22 in which are journalled individual holders 23. These have chucks 24 able to grip the crucible via a vestigial sealing tube 25. Mounted with the chucks is a bevel gear 26 in mesh with a complementary gear 27 mounted on a shaft 28, sealingly extending through the member 21. Rotation of the shaft turns the crucible so that its front face and the sidewall are evenly exposed to sputtering as described below.

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